The HEX series of PVD systems: complete flexibility and modularity
The HEX Series of thin film deposition systems provide a versatile range of deposition options for your research and implementation applications. To get started, you’re welcome to purchase the base model and upgrade to higher-level components to suit your needs as necessary. These upgrades are modular and simple to install, which reduces system downtime and installation costs.
The HEX Series includes the benchtop HEX and the larger HEX-L and HEX-XL Systems.
All systems come with turbomolecular pumps which allow for vacuum in the 10-6 to 10-7 mbar range. The benchtop HEX allows for sample sizes up to 100 mm, but also comes with a multi-sample holder that can accommodate several smaller samples simultaneously. The system contains many upgrade options, including a 300 l/s pump that can achieve a base vacuum pressure in reduced time frames.
Users may also opt for larger HEX-L or HEX-XL chambers with space for sample sizes up to 150 mm and up to 300 mm respectively, or multiple smaller samples.