The latest HEX system from Korvus Techonology to arrive in Italy has been installed at the Department of Physics and Geology of the University of Perugia, in the laboratory of Professor Francesco Cottone.
This instrument is part of the university project NanoFab, which aims to set up a laboratory for the micro and nano fabrication of innovative piezoelectric and electroactive nanomaterials and at the same time aimed at the fabrication of micro and nano electromechanical devices (MEMS, NEMS) for energy harvesting and advanced sensor applications.
Currently, the instrument is equipped with a TES thermal evaporator, an ORCA organic evaporator and a quartz microbalance to calibrate the depositions. However, thanks to the modularity of the HEX system, in the future the instrument can be enriched with additional deposition sources, according to the specific needs of the laboratory.
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