Residual gas analysers (RGA) provide a unique window into the vacuum environment for contamination monitoring, leak detection and analysis of the species of interest within the vacuum chamber, water vapour for example. The Hiden residual gas analysers are quadrupole mass spectrometers configured in a broad range of products to address applications in vacuum processing, science and technology.
Hiden residual gas analysers are equipped with software that is intuitive and multi-level offering simple fail-safe operation for a novice user whilst incorporating a broad range of useful and advanced features for the vacuum expert.
THE VACUUM RESIDUALS ROUTINELY ANALYSED INCLUDE:
- Hydrogen, measured at mass 2, and of specific interest in UHV where outgassing can be the limiting factor for achieving ultimate vacuum.
- Helium, measured at mass 4, and used as a search gas for leak detection. Hiden residual gas analysers include a dedicated leak detect mode, for fast response analysis of helium.
- Water Vapour, measured at mass 18, is the most difficult residual to pump to UHV level without baking or pumping the vacuum chamber for extended periods.
- Nitrogen and Oxygen, measured at mass numbers 28 and 32, with additional peaks measured for confirmation at mass numbers 14 and 16. The measurement of significant signal for the ‘air peaks’ is often the first indication of a chamber leak.
- Hydrocarbons are analysed at several masses across a mass scan and typically can be identified at mass numbers 69 and 71, 55 and 57, 41 and 43, and 15 for alkanes and alkenes. The residual gas analyser broad mass scan with high sensitivity allows the user to get detailed information regarding
the contamination level of the chamber. - Volatile Organic Compounds, measured at species specific masses including mass 78 for benzene, 91 for toluene, 31 for ethanol, and 45 for isopropyl alcohol.
Hiden’s residual gas analysers analyse the above species with a real-time data display to give the vacuum user immediate and updated information about the health and trends of the partial pressure of the key vacuum residuals. Data is used for routine vacuum chamber monitoring, leak detection, for analysis
of vacuum processes, and for advanced research studies.
To see the systems used in this field, please visit the link below: